美***SONIX 晶圓檢測設備 AutoWafe Pro.
SONIX AutoWafer Pro™ 是專為全自動晶圓檢測設計的機型，主要應用在Bond wafer，MEMS 內部空洞、離層檢測，TSV量測方面。
● 使用于200和300mm晶圓
● 符合******凈化間標準
● Cassette裝載，全自動檢測，支持FOUP或FOSB機械臂
● 支持200mm & 300mm SECS/GEM協議
● KLARF輸出文件
AutoWafe Pro, SONIX wafer detection device.
SONIX AutoWafer Pro™ is designed for fully automatic wafer detection, mainly for Bond wafer, MEMS internal cavity detection, separation detection, ａnd TSV measurement.
● for 200 mm ａnd 300mm wafers
● comply with the standard of first class purification room
Cassette loaded, fully automatic detection, support for FOUP or FOSB manipulator
● support 200mm & 300mm SECS/GEM protocol
● KLARF output file
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